Search Results

The best features of a comb and ring device have been combined to provide an improved micromachined angular rate sensor. The use of differential combs attached to a centrally supported ring gives this electroformed surface micromachine improved signal output and temperature performance. Previous results have been reported for vibratory ring sensors vacuum packaged in solder sealed CERDIPs. Bulk silicon etching and wafer to wafer bonding, used to fabricate millions of pressure sensors and accelerometers each year, have been employed to vacuum package this new CMOS integrated micromachine. Wafer level packaging allows for MEMS chip-scale packaging at the board level. The goal of this project is to develop a low cost sensor capable of reliably functioning at temperatures between -40 °C and 85 °C. The design, modeling, process, package, performance and automotive applications of this sensor will be covered.

Flip Chip packaging has found limited use for a technology that was introduced decades ago. Its application widened with the use of underfill, a necessary constituent to minimizing CTE mismatch between the component and substrate. Its reliability has been established on laminate substrates for automotive applications, an important development in light of the continuous increase in vehicle electronic content and function. Unfortunately, the assembly process incorporating underfill is cumbersome and batch-like. Also, the adhesive strength of the underfill depends critically on the cleanliness of the die after reflow, necessitating costly cleaning equipment and complex process monitoring protocols. Hence, the process of manufacturing is not SMT-friendly. A new technology, Wafer Applied Underfill (WAU), addresses the shortcomings of the traditional underfill process.