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AMS2535A - Coating, Vapor Deposited Poly-Monochloro-Para-Xylylene for Microcircuits

Details
Document Number: AMS2535A
Revision Number: A
Title
Coating, Vapor Deposited Poly-Monochloro-Para-Xylylene for Microcircuits
Scope
This specification covers requirements for poly-monochloro-para-xylylene coatings. Primarily for use as a secondary moisture barrier coating on hybrid microcircuit substrates and on active monolithic devices. Additionally, the coating immobilizes undesirable particles remaining in sealed microcircuits and enhances to some degree the strength of fine wire interconnections.
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