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AMS B Finishes Processes and Fluids Committee
AMS2535B - Coating, Vapor Deposited Poly-Monochloro-Para-Xylylene for Microcircuits
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Document Number:
AMS2535B
Project Initiation:
04-13-2012
Project Number:
Revision Number:
B
Sponsor Name:
Lee Gearhart
Title
Coating, Vapor Deposited Poly-Monochloro-Para-Xylylene for Microcircuits
Scope
This specification covers requirements for poly-monochloro-para-xylylene coatings. Primarily for use as a secondary moisture barrier coating on hybrid microcircuit substrates and on active monolithic devices. Additionally, the coating immobilizes undesirable particles remaining in sealed microcircuits and enhances to some degree the strength of fine wire interconnections.
Rationale
5 year review.
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