Reliability of Resonant Micromachined Sensors and Actuators 2001-01-0618
There are an increasing number of applications for resonant micromachines. Accelerometers, angular rate sensors, voltage controlled oscillators, pressure and chemical sensors have been demonstrated using this technology. Several of these devices are employed in vehicles. Vibrating devices have been made from silicon, quartz, GaAs, nickel and aluminum. Resonant microsystems are in constant motion and so present new challenges in the area of reliability for vehicular applications. The impact of temperature extremes, cyclic fatigue, stiction, thermal and mechanical shock on resonant device performance is covered.
Automotive Electronics Reliability-PT-82, Sensors and Transducers, Second Edition-PT-105, Sensors and Actuators 2001-SP-1609, SAE 2001 Transactions Journal of Passenger Cars - Electronic and Electrical Systems-V110-7