Browse Publications Technical Papers 2005-01-0898
2005-04-11

Nanometer Displacement Measurement Using High Magnification Diffraction Imaging 2005-01-0898

This paper proposes a direct nanometer measurement method using the technique of high magnification diffraction imaging. The principles of employing both gratings and speckles are described, in which the illumination distances that generate high magnified and focused images are discussed along with demonstration test results. In addition, the potential extension to sub-nanometer displacement measurement is discussed.

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