NASICON-based Electrolyte Carbon Dioxide Sensor for Monitoring Air Quality inside Automobiles 2006-01-1325
In this paper, we report how to improve the performance of a solid-state carbon dioxide (CO2) gas sensor based on NASICON solid electrolyte (Na2Zr2Si2P3O12) with a Li2CO3 auxiliary layer. The sensor is fabricated by micromachining processes and the die size is 3.2mm × 4.5 mm. Both potentiometric and amperometric sensing methods for detecting the CO2 concentration are discussed. It shows clearly that amperometric driving method is more suitable to be adopted in automobiles due to good linearity. In addition, the experimental results demonstrate that the sensing resolution of NASICON electrolyte can be improved by KrF (Krypton-Fluoride) excimer laser annealing because grain sizes of sensing chemicals are more uniform after annealing.