Browse Publications Technical Papers 2008-01-0687
2008-04-14

Humidity Sensing Based on Ordered Porous Silicon for the Application on Fuel Cell 2008-01-0687

ABSTRACT

Porous silicon as gas/chemical sensing material has been widely investigated in recent years. In this paper, the humidity sensing property of n-type porous silicon with ordered structure is studied for the first time. The ordered porous silicon used in this experiment has uniform pore size, pore shape and distribution. Both the membrane and closed bottom samples were studied. The resistance change of the porous silicon was measured. A 22-28% decrease of resistance was observed when relative humidity was changed from 1% to 100%. Both the response time and the recovery time were within 10 minutes, and 90% of the response can be reached in 6 minutes for the PS membrane sample. The possible sensing mechanism and future work are also discussed in this paper.

SAE MOBILUS

Subscribers can view annotate, and download all of SAE's content. Learn More »

Access SAE MOBILUS »

Members save up to 43% off list price.
Login to see discount.
Special Offer: With TechSelect, you decide what SAE Technical Papers you need, when you need them, and how much you want to pay.
X