Porous silicon as gas/chemical sensing material has been widely investigated in recent years. In this paper, the humidity sensing property of n-type porous silicon with ordered structure is studied for the first time. The ordered porous silicon used in this experiment has uniform pore size, pore shape and distribution. Both the membrane and closed bottom samples were studied. The resistance change of the porous silicon was measured. A 22-28% decrease of resistance was observed when relative humidity was changed from 1% to 100%. Both the response time and the recovery time were within 10 minutes, and 90% of the response can be reached in 6 minutes for the PS membrane sample. The possible sensing mechanism and future work are also discussed in this paper.
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