Using Thin Film Sensors to Measure Dynamic Forces Transmitted at Bolted Joints of Vehicles 2009-01-0635

High sensitivity and capacity thin film pressure sensors using the piezoresistive effect of ytterbium (Yb) thin films have been developed on metal plates using semiconductor manufacturing technology. The pressure sensors can effectively operate in the temperature range of −30 °C to 120 °C due to the thermally stable polycrystalline phase of ytterbium thin films. The sensors clamped at bolted joints on body mounts show excellent dynamic response comparable to that of a load cell.