Browse Publications Technical Papers 2009-01-0640

Comb Shaped Multi-Axial MEMS Structure for Automotive Electronic Stability Control System General 2009-01-0640

This paper describes our verification work for multi-axes sensing MEMS accelerometers of comb shaped structure for electronic stability control (ESC) system. The results of basic, environmental performance test and durability test using simulation, it proved that comb structure has same performance and durability with cantilever structure. And we can also find there is no difference between single axis and multi-axes sensing accelerometer’s performance. The multi-axes sensing MEMS accelerometers of comb structure can reduce costs and increase the space efficiency of the advanced ESC system


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