Optimizing the performance of the aftertreatment system used on heavy duty diesel engines requires a thorough understanding of the operational characteristics of the individual components. Within this, understanding the performance of the catalyzed particulate filter (CPF), and the development of an accurate CPF model, requires knowledge of the particulate matter (PM) distribution throughout the substrate. Experimental measurements of the PM distribution provide the detailed interactions of PM loading, passive oxidation, and active regeneration. Recently, a terahertz wave scanner has been developed that can non-destructively measure the three dimensional (3D) PM distribution. To enable quantitative comparisons of the PM distributions collected under different operational conditions, it is beneficial if the results can be discussed in terms of the axial, radial, and angular directions. This paper focuses on the development of an analysis method and metrics that quantitatively describe the PM distribution in the aforementioned directions. The metrics are a uniformity index (UI) and the 95th percentile range (PR). A uniformity index (UI) metric is further employed to qualify the 3D distribution as uniform or not. The developed analysis method was applied to scan data collected from CPFs tested under multiple engine conditions to evaluate the analysis methods ability to quantify the PM distribution.