A Parametric Study on Electrothermally Actuated Novel Compliant Micro-gripper 2019-28-0032
At Micron-levels, Thermal Actuation provides higher forces compared to the largely-used electrostatic mode of actuation. To achieve larger displacements at lesser voltages, the principle of Electro thermal actuation is used. It works on the principle of selective non-uniform Joule heating; which results in thermal expansion of the specimen due to constraints. The gripper proposed in this work is analyzed using FEA and is fabricated using Aluminum and stainless steel to achieve quicker response. The in-plane displacement, strain, stress, current density and temperature have been predicted for different magnitudes of current-voltage combination that the gripper sustains. It was found that, micro gripper performs well under 1v giving 60µm displacement. Parametric sweep was carried out using commercially available FEA software package; COMSOL Multiphysics, to study and analyse the effect of different parameters on the performance of the gripper. It has been observed that the displacement increases with the increase in applied voltage.