Frequency Output Pressure Sensors Based on an Application of Surface Acoustic Wave Technology 760093
A new type of frequency output pressure sensor is described which utilizes a novel application of Surface Acoustic Wave (SAW technology. Variations in SAW velocity over a miniature pressure dependent diaphragm are used to control the frequency of an electronic feedback oscillator. Prototype SAW pressure sensors have been built which provide a frequency output that varies almost linearly with applied pressure and is accurate to better than 0.2 percent of full scale. The high precision, digital compatibility, and mass producible integrated circuit form of these sensors makes them potentially very attractive for automotive applications.
Citation: Reeder, T., Cullen, D., and Sauder, O., "Frequency Output Pressure Sensors Based on an Application of Surface Acoustic Wave Technology," SAE Technical Paper 760093, 1976, https://doi.org/10.4271/760093. Download Citation
Author(s):
T. M. Reeder, D. E. Cullen, O. A. J. Sauder
Affiliated:
United Technologies Research Center
Pages: 9
Event:
1976 Automotive Engineering Congress and Exposition
ISSN:
0148-7191
e-ISSN:
2688-3627
Also in:
Sensors for Electronic Systems-SP-0404
Related Topics:
Integrated circuits
Pressure
Sensors and actuators
Acoustics
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