1992-02-01

A Micromachined Silicon Mass-Air-Flow Sensor 920473

This paper describes the fabrication and operation of a low-cost, monolithic silicon mass-air-flow sensor (MAFS) developed for automotive applications. The device is a hot wire anemometer made of two thin single-crystal silicon beams, one being the heated element and the other serving as a temperature reference. Temperature compensation techniques and the design tradeoffs to maximize performance while ensuring durability in the harsh automotive environment are discussed.

SAE MOBILUS

Subscribers can view annotate, and download all of SAE's content. Learn More »

Access SAE MOBILUS »

Members save up to 43% off list price.
Login to see discount.
Special Offer: With TechSelect, you decide what SAE Technical Papers you need, when you need them, and how much you want to pay.
X