1992-02-01

Piezoresistive Acceleration Sensor for Automotive Applications 920476

A small. low-cost piezoresistive acceleration sensor suitable for automotive applications such as advanced breaking control and suspension control systems has been developed.A piezoresistive semiconductor sensor has such advantages as high output linearity, long-term output repeatability and DC response a piezoelectric sensor doesn't feature. One drawback. however, is that piezoresistive characteristics are quite temperature sensitive: Such that temperature dependence of DC offset and span have to be compensated with a certain electrical circuit. With 1 mV/Vs/G, the low sensitivity of the acceleration sensor [Vs:bridge voltage. G:gravitational acceleration], the temperature shift of DC offset represented in terms of the sensitivity, becomes relatively high.For this reason, we have used a new temperature compensation circuit including a voltage supply sensitive to temperature and a compensation resistor, achieving about 3% offset temperature error per 1.5G full scale in the operating temperature range from -30 °C to 850°C.

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