Development of a Hydrogen Gas Sensor Using Microfabrication Technology 921176
In recent years, microelectronic fabrication techniques such as photolithographic reduction, thick and thin film and reactive sputtering metallization, chemical and plasma etching, etc. have been applied to the production of miniature and microsize chemical sensors. The introduction of solid electrolytes and conductive polymers further enhances the applicability of electrochemical and chemical sensors, particularly in a gaseous environment. Recent advances in micromachining technology also add new dimensions to the development of chemical sensors.