1995-02-01

Surface Micromachined Angular Rate Sensor 950538

A surface micromachined angular rate sensor utilizing a vibrating metal ring structure on a silicon IC has been developed. Substantial signal conditioning circuitry is included on the IC with the vibrating structure. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.

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