Due to the present demand for further improved emissions and performance of diesel engines, there is a growing need to improve the control of fuel injection quantity and timing, as well as spray properties. We have developed a Micro Turbine Sensor that can measure transient injection rate and timing using micro machining technology. This sensor realizes volumetric flow measurement using a tangential turbine as the sensing element which has an outside diameter of 1mm, and which is located next to the inlet connector of the injection nozzle. The measured results are compared with a Bosch type injection rate meter. Since the tendency of measured injection rate shows fair agreement with results of the reference system, this sensor has potential as a fuel flow meter which is able to measure the injection rate and timing directly and continuously during engine operation.