An Integrated Silicon Bulk Micromachined Barometric Pressure Sensor for Engine Control Unit and External Mount 970610
An Integrated Barometric Absolute Pressure Sensor (IBAP) solution for barometric pressure sensing is presented here. The IBAP is a silicon bulk micromachined monolithic pressure sensor. This work includes an examination of the design, fabrication, temperature compensation, and testing aspects. In addition, options and issues related to the mounting of the IBAP device will be presented. Two techniques, including surface mounting the sensor on the engine control unit (ECU) PWB are discussed.
Citation: Sooriakumar, K., Verma, R., Maudie, T., and Shah, M., "An Integrated Silicon Bulk Micromachined Barometric Pressure Sensor for Engine Control Unit and External Mount," SAE Technical Paper 970610, 1997, https://doi.org/10.4271/970610. Download Citation
K. Sooriakumar, Rajan Verma, Theresa Maudie, Mahesh Shah
SAE International Congress and Exposition
Sensors and Transducers-PT-68, Sensors and Actuators 1997-SP-1220