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Crosscheck tests of fast electrical mobility spectrometers, Differential Mobility Spectroscopy (DMS) and Engine Exhaust Particle Sizer(EEPS), were conducted to evaluate the accuracy of fine particle measurement. Two kinds of particles were used as test particles for the crosscheck test of instruments: particles emitted from diesel vehicles and diluted in a full dilution tunnel, and particles generated by CAST. In the steady state tests, it was confirmed that the average concentration of each instrument was within the range of ±2σ from the average concentration of all the same type of instruments. In the transient tests, it is verified that the instruments have almost equal sensitivity. For application of the fast electrical mobility spectrometers to evaluation of particle number and size distributions, it is essential to develop a calibration method using reference particle counters and sizers (CPC, SMPS, etc.) and maintenance methods appropriate for each model.