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There are an increasing number of applications for resonant micromachines. Accelerometers, angular rate sensors, voltage controlled oscillators, pressure and chemical sensors have been demonstrated using this technology. Several of these devices are employed in vehicles. Vibrating devices have been made from silicon, quartz, GaAs, nickel and aluminum. Resonant microsystems are in constant motion and so present new challenges in the area of reliability for vehicular applications. The impact of temperature extremes, cyclic fatigue, stiction, thermal and mechanical shock on resonant device performance is covered.

A double dielectric barrier discharge reactor driven by an alternating voltage is a relatively simple approach to promote oxidation of NO to NO2 for subsequent reduction in a catalyst bed. The chemical performance of such a non-thermal plasma reactor is determined by its current and electric field behavior in the gap, and by the fraction of the current carried by electrons, because the key reactants which initiate the NO oxidation and accompanying chemical changes are produced there, mostly by electron impact. We have tried to determine by models and experiments the bounds on performance of double dielectric barrier reactors and guidelines for optimization. Models reported here predict chemical results from time-resolved applied voltage and series sense capacitor data.