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Technical Paper

Thermal Imaging Technology using a Thermoelectric Infrared Sensor

2008-04-14
2008-01-0912
This paper describes a low-cost 48 × 48 element thermal imaging camera intended for use in measuring the temperature in a car interior for advanced air conditioning systems. The compact camera measures 46 × 46 × 60 mm. It operates under a program stored in the central processing unit and can measure the interior temperature distribution with an accuracy of ±0.7°C in range from 0 to 40°C. The camera includes a thermoelectric focal plane array (FPA) housed in a low-cost vacuum-sealed package. The FPA is fabricated with the conventional IC manufacturing process and micromachining technology. The chip is 6.5 × 6.5 mm in size and achieves high sensitivity of 4,300 V/W, which is higher than the performance reported for any other thermopile. This high performance has been achieved by optimizing the sensor's thermal isolation structure and a precisely patterned Au-black absorber that attains high infrared absorptivity of more than 90%.
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