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For the purpose of coping with the strengthening of NOx exhaust gas control and fuel consumption control, it is indispensable to improve the NOx purification capacity. In view of this, vehicle manufacturers are in the course of developing high performance SCR (Selective Catalytic Reduction) systems [1, 2]. For such SCR systems to be realized, high precision NOx sensors for carrying out urea injection quantity control and SCR degradation diagnosis are absolutely indispensable. Detection of NOx concentration by means of a NOx sensor is generally performed as follows: O2 is discharged by means of an O2 detection electrode; remaining NOx is decomposed by a NOx detection electrode; NOx concentration is then detected as electric current that flows when oxygen ions are conduct through solid electrolyte. In order to detect NOx of ppm-order, it is necessary to detect minute current of nA-order with high accuracy.