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Technical Paper

Pressure Sensor Module for High Temperature,High Pressure, and Quick Response

According to the advance of engine control development, demands for direct sensing of physical quantity have been growing. Regarding pressure sensing, key properties for direct sensing are robustness against high temperature and pressure, and response time in addition to accuracy. In this work, a pressure sensor module with these key properties was developed. First of all, a piezoelectric device was selected as a suitable sensing principle for the required properties because of its thermally stable piezoelectric effect and potential for simple installation structure. Regarding robustness against temperature, the sensor module was designed to form thermal isolation layer with outer housing which is optimized according to its application. Regarding robustness against pressure and response time, breakage of the piezoelectric element is the main technical issue.