Technical Paper
High Reliability High Pressure Sensor for Automotive Use
1987-02-01
870289
A piezoresistive semiconductor pressure sensor that can be measure high pressure upto 3.5 Mpa within ±1% error of FS (Full Scale) has been developed; it is suitable for use in automotive electronic control systems such as suspension, transmission, anti-skid brakes and air conditioners. This pressure sensor has a silicon diaphragm in which piezoresistive elements are diffused and form a wheatstone bridge circuit to newly developed to achieve high accuracy. High resisting pressure of more than 10 MPa (300% of rated pressure) and high sensitivity of more than 100mV/V supply ·3.5 MPa were achieved by the optimum designe of diaphragm shape.
