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Micro-machined planar orifice nozzles have been developed and used with commercially produced diesel injection systems. Such a system may have the capability to improve the spray characteristics in DI diesel engines. The availability of a MEMS (Micro-Electro-Mechanical-Systems) processing sequence supported the construction of micro-planar orifice nozzles, and micro-systems technology was also employed in our macro-instrumentation. To demonstrate this process, fourteen MEMS nozzles were fabricated with deep X-ray lithography and electroplating technology. The circular orifice diameters were varied from 40 to 260 microns and the number of orifices varied from one to 169. Three plates with non-circular orifices were also fabricated to examine the effect of orifice shape on spray characteristics. These nozzles were then attached to commercial injectors and the associated injection systems were used for the spray experiments.

We have developed and used micro-machined injector nozzles with commercially produced diesel injection systems that have the capability to improve the spray characteristics in DI diesel engines. The availability of a MEMS (Micro-Electro-Mechanical-Systems) processing sequence supported the construction of micro-diesel injector nozzles, and micro-systems technology was also employed in our macro-instrumentation. Fourteen different circular plates (nickel-iron alloy) were fabricated with deep X-ray lithography and electroplating technology. Five plates that have a single orifice were fabricated to investigate the effect of orifice diameter on spray characteristics; i.e., 40 to 260 microns. The spacing between multiple orifices was also varied; e.g., two plates that each had 41 orifices and 169 orifices, respectively, with a diameter of 40 microns. Finally, three plates with non-circular orifices were also made to examine the effect of orifice shape on spray characteristics.