Search Results

In conventional sensor systems, mechanical and electronic components are generally operating at separated locations. Smart sensors integrate mechanical and electronic elements to a single system, thus offering new facilities for a common error compensation. In this concept, a unit-specific temperature dependence and a non-linear characteristic curve of the mechanical sensor element can be tolerated, thus saving a lot of costs in the manufacturing process of the mechanical components. The behaviour of the mechanical sensor element is described by a two-dimensional sensor correction function: Given the output of the mechanical sensor element and a measured value for the temperature, the true measurement value can be calculated by an error correction unit. In this paper, different error correction methods are examined and evaluated which can be used for a wide range of sensor types. They are applied to the example of a short-circuit ring displacement sensor.

The manufacture of semiconductor sensors requires high investment and does not become economically viable until very high production numbers come into consideration. In the case of low production numbers, of the kind that come into consideration for production startups, and in the case of variations e.g. in the measuring range and similar, as may be the case due to the adaptation of models, it may be more viable to employ other techniques which likewise have a high rationalization potential which comes into effect already at low production numbers and which exhibits greater flexibility. The film techniques offer alternative sensor concepts for many measured quantities, whose production is reasonable in price even at smaller production numbers and possesses the necessary alteration flexibility. Besides these, are the advantages of the laser adjustment and the seamless connection of the evaluation electronics. Even possibilities laying within micro-machining technology can be used.