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Recently, particulate matter (PM) emission from internal combustion engines, especially particles having the diameter of less than 100 nm (Nano-particles) are being considered for their potential hazards posed to human health and the environment. Nano-particles are unstable and easily influenced by the conditions of engine operation and measurement techniques. In this study, the influences of cooling and dilution processes on nano- particles are presented to understand the generation and dilution mechanisms, and to further development of an accurate measurement method. It is found that the thermo-dilurter is necessary for measuring the nano-particles with higher accuracy. Accurate measurement of nano-particles requires immediate dilution of the exhaust gases by hot air.