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We have developed and used micro-machined injector nozzles with commercially produced diesel injection systems that have the capability to improve the spray characteristics in DI diesel engines. The availability of a MEMS (Micro-Electro-Mechanical-Systems) processing sequence supported the construction of micro-diesel injector nozzles, and micro-systems technology was also employed in our macro-instrumentation. Fourteen different circular plates (nickel-iron alloy) were fabricated with deep X-ray lithography and electroplating technology. Five plates that have a single orifice were fabricated to investigate the effect of orifice diameter on spray characteristics; i.e., 40 to 260 microns. The spacing between multiple orifices was also varied; e.g., two plates that each had 41 orifices and 169 orifices, respectively, with a diameter of 40 microns. Finally, three plates with non-circular orifices were also made to examine the effect of orifice shape on spray characteristics.