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Experiments have been conducted to determine the effectiveness of using an RF glow-discharge to increase oxygen yield from Mars atmosphere at moderate operating temperatures. Based on the tests reported here, an RF glow-discharge requires significantly less electrical power than a DC glow-discharge, while operating at lower temperatures. A brief discussion of how this approach can be combined with in situ resource utilization (ISRU) systems employing stabilized Zirconia membranes has also been presented.