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Diamond-like carbon (DLC) films are of significant interest for the automobile field, because they possess the potential to improve friction properties under various sliding conditions. Among the various DLC films, the authors focus on silicon-containing DLC (DLC-Si) films, which exhibit extremely low friction coefficient under dry sliding conditions in an ambient air atmosphere. The aim of this study is to examine the influence of silicon content in DLC-Si films on the friction property of the films, and to clarify the low friction mechanism of the films. The friction test was conducted under dry sliding conditions. It was found that the films have an exceedingly low friction coefficient (about 0.05) ranging in silicon content from 4 at% to 17 at%. In order to examine the low friction mechanism of the films, surface analyses were done on the wear surface of DLC-Si films slid against bearing steel.