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The main component of PM (particulate matter) formed in the combustion field is soot. Soot is formed by pyrolysis, polymerization and partial oxidation of hydrocarbon fuel. In this experimental research, the effects of temperature and oxygen on PAHs (polycyclic aromatic hydrocarbons) and PM formed from benzene-oxygen mixture were investigated by independent control of temperature (Tf = 1,073 K, 1,173 K, 1,273 K, and 1,338 K) and oxygen concentration (ϕ = ∞, 6.2, and 2.8). In order to investigate the growth processes of PAHs, mass concentrations of naphthalene, biphenyl, phenanthrene, anthracene, and pyrene were measured. As the result, it was found that mass concentration of biphenyl (two-ring PAH, nC = 12) was higher than naphthalene (two-ring PAH, nC = 10) under benzene-N2 mixture condition (without oxygen condition:ϕ = ∞). Mass concentrations of biphenyl and naphthalene were almost same levels under ϕ = 6.2 condition.