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Recently, as a automobile becomes more electronic and intelligent, MEMS(Micro Electro Mechanical System) sensors lead the technology and market of automotive sensor by overcome limitation of size, accuracy and reliability of mechanical sensors. Accelerometer, gyro, and pressure sensor are mainly studied MEMS sensor in the automobile field. Specially, intensification of safety regulation has increased the requirement and interest of the accelerometer. There are piezoelectric, piezoresistive, capacitive type in the sensing method of the accelerometer. Among these, piezoelectric method has high sensitivity feature with a simple manufacturing process. In this paper, we fabricated Flexural Plate Wave(FPW) accelerometer which sense frequency change of the vibrating piezoplate and found a optimum condition of the piezoplate shape and manufacturing condition to improve performances by using the design of experiment.

This paper describes our verification work for multi-axes sensing MEMS accelerometers of comb shaped structure for electronic stability control (ESC) system. The results of basic, environmental performance test and durability test using simulation, it proved that comb structure has same performance and durability with cantilever structure. And we can also find there is no difference between single axis and multi-axes sensing accelerometer’s performance. The multi-axes sensing MEMS accelerometers of comb structure can reduce costs and increase the space efficiency of the advanced ESC system