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Technical Paper

Rolled Barium Titanate (Bt) Film Capacitor for Pulsed Power Application

1999-08-02
1999-01-2596
Thin barium titanate (BT) film is being developed for use in microelectronics, electromechanical and optoelectronic applications. For this study rolled thin BaTiO3 film capacitors were fabricated using RF sputtering techniques. Capacitor grade aluminum foil was used as the bottom electrode. The top electrode was sputtered aluminum film, which was used for quick measurement purposes. The as-deposited ceramic film on aluminum foil was very flexible at room temperature and could be easily rolled. The foil was masked to preserve side electrodes. The typical dissipation factors (DF) of these BT film capacitors were in the range of 0.002 to 0.005. A low dissipation factor is extremely important for pulsed power or high power filtering applications. These BT film capacitors had a parallel resistance of 15 to 20 mega-ohm. With the thickness of the film being 8,000 Å, the average dielectric constant was calculated to be 25. The insulation resistance was about 138 giga-ohm.
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