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Technical Paper

Silicon Microsensors for Aerospace Condition Monitoring

1993-04-01
931359
This paper provides several examples of silicon “micromachined” semiconductor sensors with which the authors are involved for aerospace condition monitoring. This and related work in MEMS (Micro Electro Mechanical Systems) has the potential to revolutionize condition monitoring in aerospace condition and “health monitoring” by (1) moving “smart” electronics out to the sensor chip itself and (2) combining a vast quantity and types of, not only electronic, but micromechanical sensing schemes into the silicon chip . Precisely formed cantilevers, gears, valves, microplumbing and even micro motors of the cross-section of a human hair can be fabricated on a single silicon microchip. Silicon is an excellent mechanical material with a yield strength several times that of stainless steel. Also silicon has excellent thermal properties , whereas compatible silicon dioxide (which we typically use in connection with silicon microelectronics patterning) is virtually a thermal insulator.
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