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Monitoring motion parameters are increasingly important in automotive and robotics applications, where cheap sensors are highly desirable. A silicon micromachined structure 0.5X2cm in size was designed and fabricated, which can detect not only translational acceleration, but angular acceleration or rate simultaneously and independently, which has a particular merit since it theoretically allows single point detection of all 6 axis of freedom using only three sensors. This is accomplished by capacitive detection of the displacement and the tilt of the seismic mass, symmetrically suspended by two torsion bars. The expected linear dependencies of the output signal on translational and angular accelerations, as well as quadratic dependency on angular rate could be verified. It is shown, that the dynamic response is improved by vacuum packaging.

Controllability is defined in ISO 26262 as a driver’s ability to avoid a specified harm caused by a malfunction of electrical and electronic systems installed in road vehicles. According to Annex C of Part 12 of ISO 26262, simulation is one of the techniques that the Controllability Classification Panel (CCP) can use to evaluate comprehensively the controllability class (C class) of motorcycles. With outputs of (i) an index for the success of harm avoidance and (ii) the magnitude of the rider’s compensatory control action required to avoid harm, the simulation is useful for evaluating the C class of the degrees of malfunction that cannot be implemented in practice for the sake of the test rider’s safety. To aim at supplying data that the CCP can use to judge the C class, we try to estimate the vehicle behavior and a rider’s compensatory control actions following a malfunction using vehicle dynamics simulations.