Exhaust Gas Oxygen Sensors Based on TiO 2 Films 830167

This paper discusses the properties of EGO sensors based on thick TiO2 films. These devices are fabricated by depositing a TiO2 film on an insulating or conducting substrate. In addition to being inherently inexpensive, planar techniques provide flexibility in the fabrication of multicomponent structures incorporating temperature compensation and heating elements. Furthermore, TiO2 film sensors are found to possess faster transient response than available ZrO2 and ceramic TiO2 sensors. Results of engine studies of the properties of these new TiO2sensors will be presented and discussed.


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