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Electronic Speckle Pattern Interferometry (ESPI) is the most sensitive and accurate method for 3D deformation measurement in micro and sub micro-level. ESPI measures deformation by evaluating the phase difference of two recorded speckle interferograms under different loading conditions. By a spatial phase shift technique, ESPI allows for the rapid, accurate and continuous 3D deformation measurement. Multi-channel and carrier frequency are the two main methods of spatial phase shift. Compared with carrier frequency method, which is subject to the problem of spectrum aliasing, multi-channel method is more flexible in use. For extracting the phase value of speckles, four-step algorithm and five-step arbitrary phase algorithm are commonly used. Different algorithms have different spatial resolution, operational requirements, and phase image quality.