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The measurement of the number distribution of nanometer size particles (nanoparticles) in the diesel exhaust emission is important in order to evaluate their environmental and health impact, and to develop new types of diesel particulate filters (DPFs). Generally, the distributions of diesel particulate matter are complicated in the nanometer size regime that contains some peaks depending on the various particle formation mechanisms. They are strongly influenced by the homogeneous and heterogeneous nucleation of heavy hydrocarbons in the dilution process, and nanoparticles are also generated even in the aerosol chargers used for the electrical aerosol measurement system.