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Liquid fuel attached to the wall surface of the intake port, the piston and the combustion chamber is one of the main causes of the unburned hydrocarbon emissions from a port fueled SI engine, especially during transient operations. To investigate the liquid fuel film formation process and fuel film behavior during transient operation is essential to reduce exhaust emissions in real driving operations, including cold start operations. Optical techniques have been often applied to measure the fuel film in conventional reports, however, it is difficult to apply those previous techniques to actual engines during transient operations. In this study, using MEMS technique, a novel capacitance sensor has been developed to detect liquid fuel film formation and evaporation processes in actual engines. A resistance temperature detector (RTD) was also constructed on the MEMS sensor with the capacitance sensor to measure the sensor surface temperature.