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Resistive particulate matter sensor (PMS) is a promising solution for the diagnosis of diesel/gasoline particulate filter (DPF/GPF) functionality. Frequently triggered regeneration of their sensing element, for cleaning the soot dendrites deposited on the surface, leads to experience high temperature and thermal stress and pose high risk of developing cracks in the electrodes or sensing substrate. A semiconductor with a dopant concentration of 100 ppm~10000 ppm is applied as a sensing element for PMS self-diagnosis. Upon cooling at air, the polarization doped-insulating layer in a resistive PMS starts to resume the electrical conductivity in the wake of experiencing high regeneration temperature, through the electron and hole directional mobility.