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The mathematical model for the microwave regeneration of diesel particulate filter is proposed according to the characteristic of microwave regeneration process. The model is used to calculate the temperature field, distribution of particulate and density field of oxygen in the filter during the process of regeneration with typical ceramic foam particulate fitter data. The parametric study demonstrates how some of the main parameters, such as microwave attenuation constant of the filter, filter particulate loading, the power and distribution of microwave energy and so on, affect the efficiency of regeneration, the maximum filter temperature and regeneration duration. The results show that it is possible to regenerate the diesel particulate filters in certain conditions by using microwave energy.