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Titanium alloy (Grade V) is used in aerospace, medical, marine and chemical processing industries. To improve the thermal shock resistance and corrosion resistance of the titanium alloy at elevated temperatures, Thermal barrier coating (TBC) has been predominantly used. Cerium oxides (CeO2) have been proposed as TBC, due to their high thermal expansion coefficient, higher thermal shock resistance and low corrosion rate. In this study, CeO2 was coated on Titanium alloy by magnetron sputtering. Deposition time was varied as 30 mins, 60 mins and 90 mins respectively, to achieve the variation in thickness of coating. Thickness of the coated specimen was measured by atomic force microscopy and found to be 500 nm, 120 nm and 80 nm respectively. Surface roughness of the corresponding coated surfaces is 152.28 nm, 18.41 nm and 18.65 nm. The Vickers hardness was found to increase with decrease in coating thickness upto certain extent then decreases.