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In order to reduce traffic accident casualties, sophisticated safety systems have been developed and are continuously being upgraded in today's passenger vehicles. One system showing growth in the global automotive industry is a feature currently available on high-end passenger cars, Vehicle Stability Control (VSC). VSC can control side slipping, an unstable phenomenon which can lead to critical accidents. VSC systems are multi-functional systems that include an acceleration sensor to detect forces applied to the vehicle. Acceleration sensors sometimes referred to as G sensors are indispensable and are one of the key sensors for vehicle safety systems. New safety systems require acceleration sensors with high sensitivity and accuracy. We have achieved these increased requirements by adopting a unique stacked IC structure.