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It is observed an increasing interest in using titanium nitride (TiN) coatings to improve the wear properties of Ti alloys. An important method is the Electron Beam Physical Vapor Deposition (EBPVD) that is a form of deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum, producing a thin film in a substrate. In this work are presented results of the target and substrate production using Ti (C.P.), Ti-6Al-4V and Ti-13Nb-13Zr by powder metallurgy. Samples were produced by mixing of initial metallic powders followed by uniaxial and cold isostatic pressing with subsequent densification by sintering between 900 to 1500 °C, in vacuum. Sintered samples were characterized for phase composition, microstructure and microhardness by X-ray diffraction, scanning electron microscopy and Vickers indentation, respectively. It was shown that the samples were sintered to high densities and presented homogeneous microstructure.